A study of the neutral species rf sputtered from oxide targets
- J.W. Coburn
- E. Taglauer
- et al.
- 2014
- Japanese Journal of Applied Physics
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3 results for E. Taglauer
Glow-discharge mass spectrometry - Technique for determining elemental composition profiles in solids
- J.W. Coburn
- E. Taglauer
- et al.
- 2003
- Journal of Applied Physics
Sputtering of chemisorbed nitrogen from single-crystal planes of tungsten and molybdenum
- Harold F. Winters
- E. Taglauer
- 1987
- Physical Review B