Identification of the dominant diffusing species in silicide formation
- W.K. Chu
- H. Kraütle
- et al.
- 2003
- Applied Physics Letters
Publications
Date
Featured collections
Popular topics
4 results for Marc A. Nicolet
Amorphous (Mo, Ta, or W)-Si-N diffusion barriers for Al metallizations
- J.S. Reid
- E. Kolawa
- et al.
- 1996
- Journal of Applied Physics
Germanide formation by thermal treatment of platinum films deposited on single-crystal Ge〈100〉 substrates
- M.G. Grimaldi
- L. Wieluński
- et al.
- 1981
- Thin Solid Films
Magnetite Thin Films
- Christopher H. Bajorek
- Joseph S.-Y. Feng
- et al.
- 1972
- IEEE Transactions on Magnetics