Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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104 results for Peter Vettiger

Thermomechanical formation and thermal sensing of nanometer-scale indentations in PMMA thin films for parallel and dense AFM data storage
- - G. Cross
  - M. Despont
  - et al.
- 2000
- MRS Proceedings 2000
The "Millipede" - More than one thousand tips for parallel and dense AFM data storage
- - P. Vettiger
  - G. Gross
  - et al.
- 2000
- APMRC 2000
Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging
- - M. Despont
  - H. Takahashi
  - et al.
- 2000
- MEMS 2000
VLSI-NEMS chip for AFM data storage
- - M. Despont
  - J. Brugger
  - et al.
- 1999
- MEMS 1999
Nanomechanical nose
- - H.P. Lang
  - M.K. Baller
  - et al.
- 1999
- MEMS 1999
Microfabrication and parallel operation of 5×5 2D AFM cantilever arrays for data storage and imaging
- - M.I. Lutwyche
  - C. Andreoli
  - et al.
- 1998
- MEMS 1998
Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry
- - J. Brugger
  - M. Willemin
  - et al.
- 1997
- TRANSDUCERS 1997
High-yield wafer chuck for single-sided wet etching of MEMS structures
- - J. Brugger
  - G. Beljakovic
  - et al.
- 1997
- TRANSDUCERS 1997
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
- - M. Despont
  - H. Lorenz
  - et al.
- 1997
- MEMS 1997
Flip-chip, self-aligned, optoelectronic transceiver module
- - K. Jackson
  - E.B. Flint
  - et al.
- 1992
- IEE/LEOS Summer Topical Meetings 1992