Batch fabrication of SMA-actuated polymer microvalves
- M. Kohl
- T. Grund
- et al.
- 2007
- SMST 2007
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6 results for Roland Guerre
CMOS-compatible wafer-level microdevice-distribution technology
- R. Guerre
- U. Drechsler
- et al.
- 2007
- TRANSDUCERS 2007
Wafer-level transfer technologies for PZT-based RF MEMS switches
- Roland Guerre
- Ute Drechsler
- et al.
- 2010
- JMEMS
Low-cost AFM cantilever manufacturing technology
- Roland Guerre
- Ute Drechsler
- et al.
- 2008
- JMM
Transfer bonding technology for batch fabrication of SMA microactuators
- T. Grund
- R. Guerre
- et al.
- 2008
- European Physical Journal: Special Topics
Selective transfer technology for microdevice distribution
- Roland Guerre
- Ute Drechsler
- et al.
- 2008
- JMEMS