Publications

7 results for S. Bukofsky

High performance bulk planar 20nm CMOS technology for low power mobile applications
- - Huiling Shang
  - Sameer Jain
  - et al.
- 2012
- VLSI Technology 2012
Improving the power-performance of multicore processors through optimization of lithography and thermal processing
- - A. Gabor
  - T.A. Brunner
  - et al.
- 2007
- SPIE Advanced Lithography 2007
High performance 65 nm SOI technology with dual stress liner and low capacitance SRAM cell
- - E. Leobandung
  - H. Nayakama
  - et al.
- 2005
- VLSI Technology 2005
High-performance circuit design for the RET-enabled 65nm technology node
- - Lars Liebmann
  - Arnold Barish
  - et al.
- 2004
- AMM 2004
Optimum mask and source patterns to print a given shape
- - Alan E. Rosenbluth
  - Rama N. Singh
  - et al.
- 2002
- Journal of Microlithography, Microfabrication and Microsystems
When is bilayer thin-film imaging suitable: Comparison with single layer resists
- - Scott Halle
  - Alan Thomas
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Optimum mask and source patterns to print a given shape
- - Alan E. Rosenbluth
  - Scott Bukofsky
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering