Microstructural changes in silicon induced by patterning with focused ion beams of Ga, Si and Au
- See Wee Chee
- Martin Kammler
- et al.
- 2013
- Ultramicroscopy
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.