The effects of plasma exposure on low-k dielectric materials
- J.L. Shohet
- H. Ren
- et al.
- 2012
- SPIE Advanced Lithography 2012
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3 results for K. Mavrakakis
Dielectric damage
- H. Ren
- S. Banna
- et al.
- 2014
- ECS Transactions
The effects of plasma exposure and vacuum ultraviolet irradiation on photopatternable low-k dielectric materials
- M.T. Nichols
- K. Mavrakakis
- et al.
- 2013
- Journal of Applied Physics