EUV processing and characterization for BEOL
- Nicole Saulnier
- Yongan Xu
- et al.
- 2015
- SPIE Advanced Lithography 2015
Publications
4 results for L.L. Cheong
Closed-loop high-speed 3D thermal probe nanolithography
- Armin W. Knoll
- Michal Zientek
- et al.
- 2014
- SPIE Advanced Lithography 2014
Thermal probe nanolithography: In-situ inspection, high-speed, high-resolution, 3D
- Felix Holzner
- Philip Paul
- et al.
- 2013
- EMLC 2013
Thermal probe maskless lithography for 27.5 nm half-pitch Si technology
- Lin Lee Cheong
- Philip Paul
- et al.
- 2013
- Nano Letters