Three-dimensional nanofabrication by block copolymer self-assembly
- Caroline A. Ross
- Karl K. Berggren
- et al.
- 2014
- Advanced Materials
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Si-containing block copolymers for self-assembled nanolithography
- C.A. Ross
- Y.S. Jung
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures