Early detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection
- Oliver D. Patterson
- Deborah A. Ryan
- et al.
- 2013
- ASMC 2013
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E-beam hot spot inspection for early detection of systematic patterning problems for a 22 nm SOI technology
- Oliver D. Patterson
- Deborah A. Ryan
- et al.
- 2014
- IEEE Trans Semicond Manuf