High Volume Manufacturing Innovations for Metal-Oxide Resist Patterning
- Nicholas Latham
- Jennifer Church
- et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
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3 results for Karen Petrillo
Effect of composition uniformity in the polymer chain of EUV photoresist on lithographic performance
- Euijin Ko
- Yoorim Jang
- et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Exploration of pillar local CDU improvement options for AI applications
- Charlie Liu
- Hao Tang
- et al.
- 2020
- SPIE Advanced Lithography 2020