Flowable Chemical Vapor Deposition of Lightly Porous Low k SiCOH Dielectrics—Remote Plasma Deposition Processing, Film Analysis and Gap-Fill Application in Nano Device Fabrication
- Son Nguyen
- Thomas Haigh
- et al.
- 2022
- MRS Fall Meeting 2022
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2 results for Yiping Yao
Healthcare Wearable Sensors Adhesion to Human Fingernails and Toenails
- Katsuyuki Sakuma
- Leanna Pancoast
- et al.
- 2023
- Micromachines