DSA via hole shrink for advanced node applications
- Cheng Chi
- Chi Chun Liu
- et al.
- 2016
- SPIE Advanced Lithography 2016
Publications
35 results for Kristin Schmidt
Development of polycarbonate-containing block copolymers for thin film self-assembly applications
- Ankit Vora
- Rudy J. Wojtecki
- et al.
- 2016
- Polymer Chemistry
Synthesis and thin-film self-assembly of cylinder-forming high- χ block copolymers
- Ankit Vora
- Gabriela Alva
- et al.
- 2016
- J. Photopolym. Sci. Tech.
Synthesis and characterization of polycarbonate-containing all-organic High-χ block copolymers for directed self-assembly
- Ankit Vora
- Anindarupa Chunder
- et al.
- 2015
- J. Photopolym. Sci. Tech.
The influence of incompatibility and dielectric contrast on the electric field-induced orientation of lamellar block copolymers
- A. Böker
- K. Schmidt
- et al.
- 2006
- Polymer