Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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6 results for Yunlin Zhang

Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication
- - Narender Rana
  - Yunlin Zhang
  - et al.
- 2015
- ASMC 2015
Machine learning and predictive data analytics enabling metrology and process control in IC fabrication
- - Narender Rana
  - Yunlin Zhang
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Leveraging data analytics, patterning simulations and metrology models to enhance CD metrology accuracy for advanced IC nodes
- - Narender Rana
  - Yunlin Zhang
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Novel in-line metrology methods for Fin pitch walking monitoring in 14nm node and beyond
- - Robin Chao
  - Kriti Kohli
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Multitechnique metrology methods for evaluating pitch walking in 14 nm and beyond FinFETs
- - Robin Chao
  - Kriti K. Kohli
  - et al.
- 2014
- J. Micro/Nanolithogr. MEMS MOEMS
Leveraging advanced data analytics, machine learning, and metrology models to enable critical dimension metrology solutions for advanced integrated circuit nodes
- - Narender Rana
  - Yunlin Zhang
  - et al.
- 2014
- J. Micro/Nanolithogr. MEMS MOEMS