Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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Year

4 results for Anuja Desilva

Integrated dual SPE processes with low contact resistivity for future CMOS technologies
- - Heng Wu
  - Soon-Cheon Seo
  - et al.
- 2017
- IEDM 2017
Surface initiated polymer thin films for the area selective deposition and etching of metal oxides
- - Thomas G. Pattison
  - Alexander E. Hess
  - et al.
- 2020
- ACS Nano
Fundamental characterization of stochastic variation for improved single-expose EUV patterning at aggressive pitch
- - Jennifer Church
  - Luciana Meli
  - et al.
- 2020
- SPIE Advanced Lithography 2020
Reactive monolayers in directed additive manufacturing – area selective atomic layer deposition
- - Rudy J. Wojtecki
  - Anuja Desilva
  - et al.
- 2018
- J. Photopolym. Sci. Tech.