Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results for Weiyi Li

Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns
- - H. Miyazoe
  - S. U. Engelmann
  - et al.
- 2017
- JVSTA
Effects of cesium ion implantation on the mechanical and electrical properties of porous SiCOH low- k dielectrics
- - Weiyi Li
  - Dongfei Pei
  - et al.
- 2017
- JVSTA
Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films
- - Weiyi Li
  - Dongfei Pei
  - et al.
- 2016
- Applied Physics Letters