Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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Year

3 results for Erik Hosler

Mix-and-match considerations for EUV insertion in N7 HVM
- - Xuemei Chen
  - Allen Gabor
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Silicon fin line edge roughness determination and sensitivity analysis by Mueller matrix spectroscopic ellipsometry based scatterometry
- - Dhairya Dixit
  - Samuel O'Mullane
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology
- - Dhairya Dixit
  - Samuel O'Mullane
  - et al.
- 2015
- J. Micro/Nanolithogr. MEMS MOEMS