Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for Son Nguyen

Subtractive Ru Interconnect Enabled by Novel Patterning Solution for EUV Double Patterning and TopVia with Embedded Airgap Integration for Post Cu Interconnect Scaling
- - Chris Penny
  - Koichi Motoyama
  - et al.
- 2022
- IEDM 2022
Electromigration and Line R of Graphene Capped Cu Dual Damascene Interconnect
- - Takeshi Nogami
  - Son Nguyen
  - et al.
- 2021
- IEDM 2021
Flowable Chemical Vapor Deposition of Lightly Porous Low k SiCOH Dielectrics—Remote Plasma Deposition Processing, Film Analysis and Gap-Fill Application in Nano Device Fabrication
- - Son Nguyen
  - Thomas Haigh
  - et al.
- 2022
- MRS Fall Meeting 2022
Area-Selective Deposition of Tantalum Nitride with Polymerizable Monolayers: From Liquid to Vapor Phase Inhibitors
- - Krystelle Lionti
  - Noel Arellano
  - et al.
- 2022
- Chemistry of Materials