Publications

2 results for Hannah R. M. Margavio

Controlled Air Gap Formation between W and TiO2 Films via Sub-Surface TiO2 Atomic Layer Etching
- - Hannah R. M. Margavio
  - Jimmy Nguyen
  - et al.
- 2025
- Advanced Materials Technologies
Simultaneous Co-localized TiO₂ Etching and W Atomic Layer Deposition Using WF₆ as a Dual-Functional Reactant
- - Hannah R. M. Margavio
  - Noel Arellano
  - et al.
- 2024
- Chemistry of Materials