Copolymer approach to the design of sensitive deep UV resist systems with high thermal stability and dry etch resistance
- Hiroshi Ito
- Mitsuru Ueda
- et al.
- 1988
- ACS PMSE 1988
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.