Measured radial and angular distributions of sputtered atoms in a planar magnetron discharge
- G.M. Turner
- S.M. Rossnagel
- et al.
- 1994
- Journal of Applied Physics
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Directionality of Sputtered Cu Atoms in A Hollow Cathode Enhanced Planar Magnetron
- S.M. Rossnagel
- J.J. Cuomo
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films