Various Properties of sputtered TaxAlt-x films
- V.J. Minkiewicz
- J.O. Moore
- et al.
- 1993
- MRS Fall Meeting 1993
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2 results for S.J. Woodman
Integrated multilayer high aspect ratio milliactuators
- L.-S. Fan
- S.J. Woodman
- et al.
- 1995
- Sensors and Actuators: A. Physical