UV laser deposition of thin films at 248 NM for phase shifting mask repair
- Janos Farkas
- P.B. Comita
- et al.
- 1994
- MRS Fall Meeting 1994
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Pulsed ultraviolet laser deposition of SiO2 films at 248 nm
- Paul B. Comita
- Janos Farkas
- et al.
- 1995
- Applied Physics Letters