Publications

2 results for F. Vasey

A conic primitive-based pattern generator for electron-beam lithography of diffractive optical elements
- - H. Rothuizen
  - D. Prongué
  - et al.
- 1997
- Microelectronic Engineering
Enhanced e-beam system for the fabrication of optical elements
- - D. Prongue ́
  - H. Rothuizen
  - et al.
- 1995
- Microelectronic Engineering