Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for S. Tanaka

Step permeability and the relaxation of biperiodic gratings on si(001)
- - S. Tanaka
  - N.C. Bartelt
  - et al.
- 1997
- Physical Review Letters
Atomic step dynamics on periodic semiconductor surface structures
- - Jack M. Blakely
  - So Tanaka
  - et al.
- 1999
- Journal of Electron Microscopy
Atomic step distributions on annealed periodic Si(001) gratings
- - S. Tanaka
  - C.C. Limbach
  - et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Fabrication of arrays of large step-free regions on Si(001)
- - So Tanaka
  - C.C. Umbach
  - et al.
- 1996
- Applied Physics Letters