An analysis of the role of high energy neutral bombardment in longthrow/collimated sputtering of refractory metal barrier layers
- T. Smy
- R.V. Joshi
- et al.
- 1998
- Journal of Applied Physics
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.