Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results for S. Onishi

Relative merits of [formula omitted] and [formula omitted] plasma chemistries for dry etching of magnetic random access memory device elements
- - K.B. Jung
  - H. Cho
  - et al.
- 1999
- Journal of Applied Physics
Parametric study of NiFe and NiFeCo high density plasma etching using CO/NH₃
- - K.B. Jung
  - J. Hong
  - et al.
- 1999
- JES
Patterning of NiFe and NiFeCo in CO/NH₃ high density plasmas
- - K.B. Jung
  - J. Hong
  - et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films