Plasma etching of NiFe/Cu and NiMnSb/Al2O3 multilayers for sub-micron pattern definition
- K.B. Jung
- J. Hong
- et al.
- 1999
- Journal of Magnetism and Magnetic Materials
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2 results for M. Jenson
High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements
- K.B. Jung
- J. Hong
- et al.
- 1999
- Applied Surface Science