Modeling 3D effects of substrate topography on step coverage and film morphology of thin metal films
- T. Smy
- S.K. Dew
- et al.
- 2002
- Thin Solid Films
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An analysis of the role of high energy neutral bombardment in longthrow/collimated sputtering of refractory metal barrier layers
- T. Smy
- R.V. Joshi
- et al.
- 1998
- Journal of Applied Physics