Positron annihilation techniques suited for porosity characterization of thin films
- M.P. Petkov
- C.L. Wang
- et al.
- 2003
- Journal of Physical Chemistry B
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Nanometer-scale pores in low-k dielectric films probed by positron annihilation lifetime spectroscopy
- C.L. Wang
- M.H. Weber
- et al.
- 2002
- Applied Physics Letters