Synthesis and Properties of Diazopiperidiones for Use in Nonchemically Amplified Deep UV Photoresists
- Peter I. Tattersall
- David Breslin
- et al.
- 2004
- Chemistry of Materials
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.