Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics
- J.A. Lubguban
- S. Gangopadhyay
- et al.
- 2004
- Journal of Materials Research
Publications
4 results for T. Rajagopalan
Supercritical CO2 treatments for semiconductor applications
- S. Gangopadhyay
- J.A. Lubguban
- et al.
- 2004
- MRS Proceedings 2004
Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
- T. Rajagopalan
- B. Lahlouh
- et al.
- 2003
- Applied Physics Letters
Creating nanoporosity by selective extraction of porogens using supercritical carbon dioxide/cosolvent processes
- B. Lahlouh
- T. Rajagopalan
- et al.
- 2003
- MRS Proceedings 2003