Imaging at high beam energies in the scanning electron microscope
- L. Gignac
- S.H. Boettcher
- et al.
- 2006
- M&M 2006
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2 results for M. Kawasaki
Imaging and analysis of subsurface Cu interconnects by detecting backscattered electrons in the scanning electron microscope
- L. Gignac
- M. Kawasaki
- et al.
- 2005
- Journal of Applied Physics