Incorporating process variation contours in design rule calculation and SRAM design optimization
- Dongbing Shao
- Jing Sha
- et al.
- 2019
- SPIE Advanced Lithography 2019
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The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
- Chi-Chun Liu
- Yann Mignot
- et al.
- 2018
- SPIE Advanced Lithography 2018