Supercritical CO2 treatments for semiconductor applications
- S. Gangopadhyay
- J.A. Lubguban
- et al.
- 2004
- MRS Proceedings 2004
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Nanoporous organosilicate films as antireflection coatings
- Koushik Biswas
- Shubhra Gangopadhyay
- et al.
- 2006
- Thin Solid Films