Self-aligned, self-assembled organosilicate line patterns of ∼20nm half-pitch from block copolymer mediated self-assembly
- Ho-Cheol Kim
- Joy Cheng
- et al.
- 2007
- SPIE Advanced Lithography 2007
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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4 results for Linnea Sundström
Fabrication of 20 nm half-pitch gratings by corrugation-directed self-assembly
- Ho-Cheol Kim
- Charles T. Rettner
- et al.
- 2008
- Nanotechnology
Templated germanium nanowire synthesis using oriented mesoporous organosilicate thin films
- Hemanth Jagannathan
- Michael Deal
- et al.
- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Patterning ∼20 nm half-pitch lines on silicon using a self-assembled organosilicate etch mask
- Linnea Sundström
- Leslie Krupp
- et al.
- 2006
- Applied Physics Letters