Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results for Junghoon Joo

The effects of impurity and temperature for transparent conducting oxide properties of Al:ZnO deposited by dc magnetron sputtering
- - Wonkyun Yang
  - S.M. Rossnagel
  - et al.
- 2012
- Vacuum
Plasma modeling of a PEALD system for the deposition of TiO ₂ and HfO ₂
- - Junghoon Joo
  - Steve M. Rossnagel
- 2009
- Journal of the Korean Physical Society
Across-wafer nonuniformity of long throw sputter deposition
- - A. Mayo
  - S. Hamaguchi
  - et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures