The effects of impurity and temperature for transparent conducting oxide properties of Al:ZnO deposited by dc magnetron sputtering
- Wonkyun Yang
- S.M. Rossnagel
- et al.
- 2012
- Vacuum
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3 results for Junghoon Joo
Plasma modeling of a PEALD system for the deposition of TiO 2 and HfO 2
- Junghoon Joo
- Steve M. Rossnagel
- 2009
- Journal of the Korean Physical Society
Across-wafer nonuniformity of long throw sputter deposition
- A. Mayo
- S. Hamaguchi
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures