Publications

2 results for Vaishali Vohra

Fundamental investigation of Negative Tone Development (NTD) for the 22nm node (and beyond)
- - Guillaume Landie
  - Yongan Xu
  - et al.
- 2011
- SPIE Advanced Lithography 2011
A new breed of wet-developable BARC materials
- - Libor Vyklicky
  - Wu-Song Huang
  - et al.
- 2009
- J. Photopolym. Sci. Tech.