EXPERIMENTAL AND CHEMICAL KINETIC MODELLING STUDY OF SILICON CVD FROM MONOSILANE AND DISILANE.
- B.S. Meyerson
- B.A. Scott
- et al.
- 1986
- Chemtronics
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.