Process Damage and Contamination Effects for Shallow Si Implanted GaAs
- H. Baratte
- A.J. Fleischman
- et al.
- 2019
- JES
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3 results for A.J. Fleischman
Thermally stable, low-resistance NiInWNx ohmic contacts to n-type GaAs prepared by sputter deposition
- Masanori Murakami
- Naftali Lustig
- et al.
- 1991
- Applied Physics Letters
Process damage and contamination effects for shallow Si implanted GaAs
- H. Barratte
- G. Scilla
- et al.
- 1989
- ECS Meeting 1989