Accuracy and efficiency in electron beam proximity effect correction
- S.J. Wind
- P.D. Gerber
- et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
5 results for P.D. Gerber
Analysis of Mismatch Sensitivity in a Simultaneously Latched CMOS Sense Amplifier
- Rahul Sarpeshkar
- John L. Wyatt
- et al.
- 1992
- IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing
Mismatch Sensitivity of A Simultaneously Latched CMOS Sense Amplifier
- Rahul Sarpeshkar
- John L. Wyatt
- et al.
- 1991
- IEEE Journal of Solid-State Circuits
Determination of proximity effect correction parameters for 0.1 μm electron-beam lithography
- Michael G. Rosenfield
- S.J. Wind
- et al.
- 1990
- Microelectronic Engineering
Modeling of luminescence phase delay for nondestructive characterization of Si wafers
- D. Guidotti
- J.S. Batchelder
- et al.
- 1989
- Journal of Applied Physics