Process latitude study of focused ion-beam-deposited gold for clear x-ray mask repair
- Patricia G. Blauner
- Andrew D. Dubner
- et al.
- 1993
- Microlithography 1993
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5 results for A.D. Dubner
Combinations of point source electron beams and simple electrostatic lenses: Initial demonstrations of micron-scale lenses
- G.M. Shedd
- H. Schmid
- et al.
- 1993
- Review of Scientific Instruments
The role of the ion-solid interaction in ion-beam-induced deposition of gold
- A.D. Dubner
- A. Wagner
- et al.
- 1991
- Journal of Applied Physics
In situ measurement of ion-beam-induced deposition of gold
- A.D. Dubner
- A. Wagner
- 1989
- Journal of Applied Physics
The role of gas adsorption in ion-beam-induced deposition of gold
- A.D. Dubner
- A. Wagner
- 1989
- Journal of Applied Physics