Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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6 results for T. Lin

Effect of excess silicon on behavior of LPCVD WSi_x films on silicon
- - R.V. Joshi
  - Young H. Kim
  - et al.
- 1988
- Thin Solid Films
Properties of selective low pressure chemically vapor deposited tungsten films produced by hydrogen reduction in a cold wall system
- - R.V. Joshi
  - D.A. Smith
  - et al.
- 1988
- Thin Solid Films
Tungsten-rhenium alloys as diffusion barriers between aluminum and silicon
- - S.-E. Hörnström
  - T. Lin
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Relationship between substrate bias and microstructure in magnetron-sputtered AlCu films
- - T. Lin
  - K.Y. Ahn
  - et al.
- 1987
- Thin Solid Films
Effects of substrate temperature on copper distribution, resistivity, and microstructure in magnetron-sputtered Al-Cu films
- - K.Y. Ahn
  - T. Lin
  - et al.
- 1987
- Thin Solid Films
Transport in refractory metals and their interaction with SiO₂: Comparison of tungsten and molybdenum
- - L. Krusin-Elbaum
  - M.O. Aboelfotoh
  - et al.
- 1987
- Thin Solid Films