Excimer laser as a source for thin Cu film deposition for use in electronic device fabrication
- A. Sugerman
- Bodil Braren
- et al.
- 1993
- SPIE OE/LASE 1993
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PtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- H.-C.W. Huang
- B. Cunningham
- et al.
- 2019
- JES