Excimer laser as a source for thin Cu film deposition for use in electronic device fabrication
- A. Sugerman
- Bodil Braren
- et al.
- 1993
- SPIE OE/LASE 1993
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.