Plasma potentials of 13.56-MHz rf argon glow discharges in a planar system
- K. Köhler
- J.W. Coburn
- et al.
- 1985
- Journal of Applied Physics
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Frequency dependence of ion bombardment of grounded surfaces in rf argon glow discharges in a planar system
- K. Köhler
- D.E. Horne
- et al.
- 1985
- Journal of Applied Physics