A commercially viable 193 nm single layer resist platform
- F.M. Houlihan
- Thomas I. Wallow
- et al.
- 1997
- J. Photopolym. Sci. Tech.
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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7 results for Francis M. Houlihan
Approaches to the Design of Radiation-Sensitive Polymeric Imaging Systems with Improved Sensitivity and Resolution
- Jean M.J. Fréchet
- Theodore G. Tessier
- et al.
- 2019
- JES
Thermally Depolymerizable Polycarbonates. 2. Synthesis of Novel Linear Tertiary Copolycarbonates by Phase-Transfer Catalysis
- F.M. Houlihan
- F. Bouchard
- et al.
- 2002
- Macromolecules
Synthesis of cycloolefin-maleic anhydride alternating copolymers for 193 nm imaging
- F.M. Houlihan
- Thomas I. Wallow
- et al.
- 1997
- Macromolecules
Novel derivatives of poly(4-hydroxystyrene) with easily removable tertiary, allylic, or benzylic ethers
- Jean M.J. Fréchet
- Nell Kallman
- et al.
- 1988
- Polymer Bulletin
Thermally depolymerizable polycarbonates v. Acid catalyzed thermolysis of allylic and benzylic polycarbonates: A new route to resist imaging
- Jean M. J. Fréchet
- Francine Bouchard
- et al.
- 1987
- Polymer Journal
Design, synthesis, and study of novel, thermally depolymerizable polycarbonates
- Jean M. J. Fréchet
- Francis M. Houlihan
- et al.
- 1985
- Journal of the Chemical Society, Chemical Communications