A Three-Layer Resist System for Deep U.V. and RIEMicrolithography on Nonplanar Surfaces
- E. Bassous
- G. Pepper
- et al.
- 2019
- JES
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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7 results for D.J. Mikalsen
Superconducting thin films of the Bi-Sr-Ca-Cu-O system prepared by multilayer metal deposition
- D.J. Mikalsen
- R.A. Roy
- et al.
- 2011
- Journal of Materials Research
Measurement of thermal stress and stress relaxation in confined metal lines. I. Stresses during thermal cycling
- M.A. Moske
- P.S. Ho
- et al.
- 1993
- Journal of Applied Physics
Measurement of thermal stress and stress relaxation in confined metal lines. II. Stress relaxation study
- M.A. Moske
- P.S. Ho
- et al.
- 1993
- Journal of Applied Physics
Stress and phase changes in a low-thermal-expansion Al-3at.%Ge alloy film on oxidized silicon wafers
- K.N. Tu
- K.P. Rodbell
- et al.
- 1993
- Materials Chemistry and Physics
Collimated magnetron sputter deposition
- S.M. Rossnagel
- D.J. Mikalsen
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Stress modification of WSi2.2 films by concurrent low energy ion bombardment during alloy evaporation
- D.S. Yee
- J. Floro
- et al.
- 1985
- JVSTA