Low-temperature redistribution of As in Si during Ni silicide formation
- I. Ohdomari
- M. Akiyama
- et al.
- 1984
- Journal of Applied Physics
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3 results for T. Maeda
Reduction of contact resistivity by As redistribution during Pd 2Si formation
- I. Ohdomari
- M. Hori
- et al.
- 1983
- Journal of Applied Physics
Low temperature doping of arsenic atoms in silicon during Pd2Si formation
- I. Ohdomari
- K. Suguro
- et al.
- 1982
- Thin Solid Films