Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results for T. Maeda

Low-temperature redistribution of As in Si during Ni silicide formation
- - I. Ohdomari
  - M. Akiyama
  - et al.
- 1984
- Journal of Applied Physics
Reduction of contact resistivity by As redistribution during Pd ₂Si formation
- - I. Ohdomari
  - M. Hori
  - et al.
- 1983
- Journal of Applied Physics
Low temperature doping of arsenic atoms in silicon during Pd₂Si formation
- - I. Ohdomari
  - K. Suguro
  - et al.
- 1982
- Thin Solid Films