Pre- and Postepitaxial Gettering of Oxidation and Epitaxial Stacking Faults in Silicon
- M.C. Chen
- V.J. Silvestri
- et al.
- 2019
- JES
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Post-Epitaxial Polysilicon and Si3N4 Gettering in Silicon
- M.C. Chen
- V.J. Silvestri
- 2019
- JES